Approved
Optimizing FinFET Geometry using a Chemical Mechanical Polishing Process
Paul Böhm ()
Start
2024-09-04
Presentation
2025-05-30
Location:
Finished:
2025-06-07
Master's thesis:
Abstract
Supervisor: Avinas Shaji (EIT) and Erik Lind (EIT)
Examiner: Johannes Svensson (EIT)
