Approved
Investigation on the Optimization of GaN Etching for FinFET Applications
Albert Malmros ()
Start
2022-01-18
Presentation
2022-05-31 09:15
Location:
E:2517
Finished:
2022-06-21
Master's thesis:
Abstract
Supervisor: Erik Lind (EIT) and Philipp Gribisch (EIT)
Examiner: Lars-Erik Wernersson (EIT)